• The needle holder (measurement jig), a key element in tracing-type inspection equipment, adopts a unique mechanism taking advantage of our know-how to enable the system to test patterns with fine pitches of L/S=50/10 µm.
• In addition, as a countermeasure against scratches on vulnerable substrates, the measurement jig is designed to make its contact pressure on substrates adjustable.

About the tracing system

Measurements of patterns with finer pattern pitches makes improvements, not only in hardware parameters such as mechnical accuracy, but also in the essential management of condition setting controls, including the correction function of software.
The LPC-500F provides a separate tool dedicated to fine pitch testing (optional) to achieve fine pitch measurements of L/S=40/10µm.

The system scans a substrate at a constant speed independent of the number of panels on the substrate. Therefore, the increase in the number of panels or the number of lines does not affect the inspection time. The system is best suited for measuring gang printed substrates for small to medium-size organic EL or STN panels often used for devices like mobile phones and PDAs.

Setup can be performed by changing the position of the needle holder. This procedure eliminates the need for model-specific jigs, resulting in reduced running cost. In addition, the LPC-500F uses a touch panel to perform setup changes to eliminate cumbersome connection exchange work by changing measurement methods. This feature enables the user to perform setup quickly and easily.