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| Partial Exposure (Shutter blade mechanism) |
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- To minimize the scaling error of expansion and shrinkage of the panel and / or photomask, the shutter blocks the light to areas other than the exposure area. The number of sections a panel can be divided into is user-defined as 2 / 3 / 4 / 6.
- Alignment is made prior to each section being exposed. The number of sections to be exposed separately depends on the accuracy required by the panel. Conventional global exposure is also available.
- Use of a large-area mask makes it possible to print the serial number on each smallest-unit printed circuit pattern.This equipment is less expensive than a stepper featuring the same step exposure system.
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| Shutter operations for step exposure |
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When partial exposure devides into 6 areas, after pre-alignment of entire panel is made, alignment and expousre are repeated in every partial area (area 1 through 6).
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