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| Step & Step Enlarging Projection Exposure Equipment [ New ] |
| APEX5000 series |
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| APEX5000 series is a projection-type exposure system equipped with selectable ADTEC's unique Step-and-Step method, which brings more flexibility in imaging of PCB pattern, in addition to existing step-and-repeat method. |
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| Features |
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| Step & Step method (Patent pending) |
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Both reticle (photomask) and exposure stage are driven at each step / shot of exposure, so that more flexible imaging of PCB pattern can be realized, which is not achieved with existing step-and-repeat method.
(Imaging of coupon around PCB pattern, location number of each product piece, uneven division, etc. ) |
| Independent variable magnification function in X & Y direction |
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Real-time adjustment of projection magnification individually in X & Y direction can be carried out, allowing compensation of uneven distortion on PCB. |
| High resolution capability of projection optics |
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High image resolution is obtained evenly throughout the entire imaging area with minimal image distortion by designing with consideration of factors such as lens processing and assembling accuracy. |
| Large depth of focus (D.O.F.) |
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Achieving large depth of focus (D.O.F.) enables the processing of substrates that has uneven surface, warpage and / or distortion. |
| TTL (Through The Lens) alignment method |
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High registration accuracy can be accomplished including individual magnification adjustment in X & Y direction by the simultaneous detection of the projected image of fiducial marks from the photomask and fiducial marks on the substrate individually by separate CCD cameras. |
| Reticle changer |
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Reticle (photomask) changer enables automatic photomask change over. |
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