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| Step & Repeat Enlarging Projection Exposure Equipment |
| APEX4000 series |
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APEX4000 series is a projection-type exposure system equipped with step-and-repeat method for printed circuit boards.
A 2x magnified projection optics designed by ADTEC realizes a wide imaging area covered by a single shot of exposure. |
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| Features |
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| 2X projection magnification |
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Full plate exposure is possible for an area as large as 250X200mm(f320mm) with a mask as small as 6 inches square (152X152mm).This equipment enables the user to minimize mask cost as well as reduce mask storage space. |
| High resolution capability of projection optics |
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High image resolution is obtained evenly throughout the entire imaging area with minimal image distortion by designing with consideration of factors such as lens processing and assembling accuracy. |
| High productivity |
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This equipment achieves high throughput with processing exposure of a substrate of 510X610mm size with six exposure shots and a substrate of 510X410mm size with four exposure shots. |
| Exposure Area |
4 Exposure Steps |
6 Exposure Steps |
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| Large depth of focus (D.O.F.) |
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Achieving large depth of focus (D.O.F.) enables the processing of substrates that has uneven surface, warpage and / or distortion. |
| Independent vertical and horizontal variable exposure-magnification feature (X-Y independent variable magnification feature) |
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The equipment can automatically adjust the projection magnification independently in X and Y directions, providing correction with sufficient accuracy for expansion or contraction of substrates, a characteristic issue of printed circuit boards. |
| TTL (Through The Lens) alignment system |
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The system achieves independent X-Y variable magnification and alignment with high accuracy by using separate CCDs to simultaneously detect the projected images of alignment marks of the mask and the marks on the substrate.
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| Reticle changer |
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Reticle (photomask) changer enables automatic photomask change over. |
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