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| Semi-automatic Exposure Equipment |
| ADEX900 SERIES |
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| Incorporating the same high-precision exposure technology as our automatic exposure equipment, the ADEX900 SERIES semi-automatic exposure equipment offer easy operation and setup for multi-product, small-lot production. |
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| Features |
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| High-precision alignment |
An alignment operation is performed on the exposure stage, and then confirmed again right before exposure to ensure reliable, high alignment precision. Use of a shape search method for image processing enables the equipment to improve mark recognition capability. |
| Two-stage table strucure |
To ensure stable adhesion of the substrate to the exposure stage, the substrate placement is optimized according to the substrate size.
In addition, the exposure stage is structured with a two-stage sliding configuration that enables preparation of the next substrate on one exposure table while exposure is being performed on a substrate on another exposure table. |
| Minimizing dust generation |
With the use of a stainless steel covers, an ionizer, and HEPA-filtered clean air blown downward into the exposure room, the equipment is able to minimize defects caused by air-borne dust particles. |
| Operability and setup changes |
The equipment is operated with a dialog-type touch panel.Up to 1000 types of work including camera positions can be registered to the systems. This feature enables the systems to provide easy operation and efficient setups best suited for multi-product, small-lot production. |
| Step exposure feature |
The equipment is adaptable to installation of step exposure shutters that are normally equipped within the ADEX5100 SERIES.
About step exposure
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