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| Automatic Exposure Equipment for Patterning [New] |
| ADEX3000P |
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ADEX3000P provides two interchangeable exposure methods: the vacuum contact method and pressure contact method.
Extensive improvement in the substrate transportation mechanism, contact method, countermeasures against dust, and alignment accuracy enable the system to achieve more stable production of high-quality boards than conventional systems. |
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* The photograph shows the equipment with a cleaning roller addition (optional) |
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| Features |
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| High-precision alignment |
- An alignment operation is performed on the exposure stage, and then confirmed again right before exposure to ensure reliable, high alignment precision. Use of a shape search method for image processing enables the equipment to improve mark recognition capability.
- In addition to the conventional mark-registration method, MMD method (based on the minimum distance between marks) is also available for alignment.
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| Adaptability to thin substrate (one-piece table structure) |
The exposure stage uses a one-piece table with no joints to achieve stable transportation, adhesion, and exposure for thin substrates such as flexible boards. |
| Minimizing dust generation |
By making room to equip a cleaning roller in the reversal unit, substrates can be effectively cleaned. The new, automatic cleaning mechanism for masks and platens also minimizes defects caused by dust. |
| High-speed substrate transportation mechanism |
Substrate transportation is performed by arms equipped with vacuum adhesion.The arm driving mechanism achieves high-speed, high-precision, and clean transportation. |
| Spacer-less exposure |
In addition to the conventional pressure contact method, spacer-less exposure is now available with the vacuum contact method. (except for certain sizes) |
| Remote support services |
The exposure equipment is connected to our support center via the internet. By monitoring the work process with on-screen images, and with touch-panel screens that bring about immediate response, real time service is available. |
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